Renishaw RLD10 plane mirror interferometer from the UK

NegotiableUpdate on 01/22

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Overview

The Renishaw RLD10 plane mirror interferometer $r $nRLD10 plane mirror interferometer $r $n plane mirror interferometer from the UK is suitable for XY platform applications.

Product Details

RLD10 plane mirror interferometer

The planar mirror interferometer is suitable for XY platform applications.

The RLD10 transmitter contains an interferometer group, a multi-channel stripe detection system, a laser shutter, and a built-in laser collimation auxiliary mirror. Provide two RLD10 transmitter models: 0 ° and 90 °.

Features and advantages

Dual axis solutionThe biaxial plane mirror system is an ideal solution for XY platform applications.
High resolutionCompared with the conical reflector system, the planar mirror system can also be used for applications that require higher resolution.
Sensitive environmentWe also provide low-power models of planar mirror interferometer emission heads. Suitable for applications with power consumption requirements lower than the standard RLD rating (i.e.<2 W).

RLD发射头和镜组

Specifications

Axial travel	0 m to 1 m
Resolution (using RLU configuration)	Simulate orthogonal=λ/4 (158 nm) Digital orthogonal=10 nm RPI20 resolution=38.6 pm
System Nonlinear Error * (SDE) *Excluding interfaces	When the signal strength is below 50 mm/sec and greater than 70%, it is less than ± 2.5 nm When 1 m/sec and signal strength>50%,<± 7.5 nm
speed	Up to 1 m/sec

For non vacuum applications, some form of refractive index compensation is required to maintain accuracy under varying environmental conditions. Renishaw provides the RCU10 real-time square wave compensation system for compensating for environmental changes.

If the RPI20 parallel interface is selected and integrated into the RLE system, a resolution of 38.6 picometers can be achieved. This interface can receive differential analog 1 Vpp sine/cosine signals and provide parallel output format. For detailed information about the attachments, please refer to the RCU10 compensation system and laser ruler interface.

Renishaw RLD10 plane mirror interferometer from the UK