Renishaw RLD10 differential interferometer from the UK

NegotiableUpdate on 01/22

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Nature of the Manufacturer: Producers

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Overview

The Renishaw RLD10 differential interferometer from the UK allows for the measurement of positional changes relative to a defined reference object.

Product Details

RLD10 differential interferometer

Differential interferometers allow for the measurement of positional changes relative to a defined reference object.

The differential emitter has an optical design that can achieve extremely low SDE performance. The built-in laser collimation auxiliary mirror can adjust the pitch and yaw angles during the setting process, thereby improving the collimation process (only suitable for flat mirror applications).

The RLD10-X3-DI emitter can be installed on the exterior wall of the working chamber using a simple three pin mounting bracket. The optical path can be calibrated without entering the working chamber. The built-in laser collimation auxiliary mirror can independently adjust the pitch and torsion of the reference and measurement beams. The design of the installation system allows for the disassembly and adjustment of the emission head position, with minimal impact on the system collimation.

Features and advantages

Excellent measurement performance- ppb stable frequency accuracy, ultra-low cycle error, output resolution reaches 38.6 pm.
Differential configuration- Measure the displacement of the motion platform relative to the installation column to eliminate common mode errors, such as the movement of the working area sidewall related to environmental fluctuations.
Quickly adjust collimationFour built-in laser collimation auxiliary mirrors are used to easily adjust the collimation outside the vacuum chamber, thereby eliminating installation tolerances for the vacuum chamber and mirror group.

Specifications

axis travel	0 m - 1 m
Resolution (using RLU configuration)	Simulate orthogonal=λ/4 (158 nm) Digital orthogonal=10 nm RPI20 resolution=38.6 pm
System Nonlinear Error * (SDE) *Excluding interfaces	When the signal strength is less than 50 mm/sec and greater than 70%, it is less than ± 1 nm When 1 m/sec and signal strength>50%,<± 6 nm
speed	Up to 1 m/s

Renishaw RLU20 is commonly used to configure differential interferometer emitters. The high stability of RLU20 laser source combined with the high performance of differential interferometer emitter head will undoubtedly become an ideal choice for applications in vacuum chambers and other air conditioning environments with strict control.

Renishaw RLD10 differential interferometer from the UK