Welcome Customer !

Membership

Help

Shenyang Kejing Automation Equipment Co., Ltd
Custom manufacturer

Main Products:

mechb2b>Products

Shenyang Kejing Automation Equipment Co., Ltd

  • E-mail

    kejing@sykejing.com

  • Phone

    18624331856,18624331865,18624331992,18624331806,18

  • Address

    No. 26-2-7 Xuefeng Road, Hunnan New District, Shenyang, Precision Instrument Industrial Park

Contact Now

SE-VM spectroscopic ellipsometer

NegotiableUpdate on 02/18
Model
Nature of the Manufacturer
Producers
Product Category
Place of Origin
Overview
Product Introduction: SE-VM is a high-precision and fast spectroscopic ellipsometer. The characterization and analysis of optical parameter thin films and nanostructures can be quickly achieved through the measurement of ellipsoidal parameters, transmission/reflectivity, and other parameters, which is suitable for the rapid measurement and characterization of thin film materials. Supports high compatibility and flexible configuration of multi angle, micro spot, visual leveling system, and customized design of multifunctional modules. $r $n $r $n high-precision ellipsometry measurement solution; Ultra high precision, fast and non-destructive measurement; Support flexible customization of functional modules for multi angle, micro spot, and visual leveling systems; Rich databases and geometric structure model libraries ensure powerful data analysis capabilities
Product Details

Product Model

SE-VM spectroscopic ellipsometer

Main Features

1. Adopting high-performance imported composite light source, the spectrum covers the visible near-infrared range (380-1000nm)

2. High precision rotary compensator modulation and PCRSA configuration for high-speed acquisition of Psi/Delta spectral data

3. Supports flexible series configuration and can be customized with multifunctional modules according to different application scenarios

4. Hundreds of material databases and multiple algorithm model libraries cover the vast majority of optoelectronic materials currently available

Technical Specifications

1. Automation level: manual angle adjustment

2. Application positioning: Universal type

3. Basic functions: Psi/Delta, N/C/S, R/T spectra, etc

4. Analyze the spectrum at 380-1000nm (expandable to 210-1650nm)

5. Single measurement time: 0.5-5s

6. Repeatability measurement accuracy: 0.01nm

7. Spot size: Large spot size 2-3mm, micro spot size 200 μ m

8. Incident angle adjustment method: manual angle adjustment

9. Incident angle range: 55-75 ° (5 ° step), 90 °

10. Focus finding method: manual focus finding

11. Mapping itinerary: not supported

12. Support sample size: up to 180mm

Optional accessories

1

Temperature control table

2

Mapping extension module

3

vacuum pump

4

Transmission adsorption component