EQ-TM106 film thickness monitor

NegotiableUpdate on 02/18

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Nature of the Manufacturer: Producers

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Place of Origin

Online Consult

Overview

The EQ-TM106 film thickness monitoring instrument uses quartz crystal oscillation principle and frequency measurement technology to perform online monitoring of film thickness. Mainly used in the thin film preparation process of MBE, OLED thermal evaporation, magnetron sputtering and other equipment, for real-time monitoring of film thickness and coating rate.

Product Details

EQ-TM106 film thickness monitorIt adopts the principle of quartz crystal oscillationCombined with*Frequency measurement technology，Perform online monitoring of film thickness. mainshouldforMBETheOLEDThermal evaporation, magnetron sputtering and other equipmentofDuring the process of film preparation，forrightFilm thickness and coating ratePerform real-time operationsmonitor.EQ-TM106 film thickness monitoraccording toPreparation of thin filmsReal time speed can outputPWM(Pulse Width Modulation)Analog quantity,asThe membrane thickness sensor is used in conjunction with a regulator and an evaporation power supply to achieve closed-loop rate control of the evaporation sourceTo detect the thickness of the prepared thin film.EQ-TM106 film thickness monitorSmall size can save laboratory space, simple principle, easy operation, especially suitable for the use of thin film preparation process in the laboratory.

productname	EQ-TM106 film thickness monitor
Product Model	EQ-TM106
Main Features	1、thismachineCan be connected to a computer. 2display meterhaveinterfaceconciseIt has the advantages of being intuitive, reasonable, and easy to operate, and can intuitively display the measured film thickness, rate, frequency, etcPWMControl the percentage of output and other working states. 3The gate control time, output mode, rate algorithm, material parameters, output range, and communication parameters can be set through software or display instrument, and the measured relevant data can be written inExceldocument. 4It has the advantages of ultra small size, high measurement accuracy, simple operation, and convenient use.
Technical Specifications	EQ-TM106-1 Monitoring Component 1. Power supply: DC 5V（±10%），High current 400mA 2. Frequency resolution:±0.03Hz 3. Film thickness resolution:0.0136Å（aluminium） 4. Film thickness accuracy:±0.5%It depends on the process conditions, especially the position of the sensor, material stress, temperature, and density 5. Measurement speed: 100ms-1s/time，adjustable 6. Measurement range: 500000 Å（aluminium） 7. Standard sensor crystal: 6MHz 8. Computer interface: RS-232/485serial interface（Baud rates of 1200, 2400, 4800, 9600, 19200, and 38400 can be set，data bit：8，stop bit：1，verify：none） 9. Analog output: 8Bit resolution，PWM pulse width modulation output（Open collector or internal 5V output） 10. Working environment: Temperature 0-50 ℃, humidity 5% -85% RH, no condensation droplets allowed 11. Dimensions: 90mm×50mm×18mm
	EQ-TM106-2 Display Instrument 1. Input power supply: AC 220V±10% 2. Output power supply: DC 5V 3A 3. Display: 12×2 digital tubesandLED 4. Communication port: RS-485（Baud rates of 1200, 2400, 4800, 9600, 19200, and 38400 are availableset up,data bit：8 digits，stop bit：1 person，parity check：none） 5. Dimensions: 182mm×65mm×160mm
	EQ-TM106-3 probe 1. Applicable chip frequency: 6MHz 2. Applicable chip size:Ø14mm 3. Installation flange: CF35 4. Cooling water pipe:Ø3mm, with a length of 300mm、500mm、1000mm 5. Cooling water pressure:<0.3MPa 6. Pneumatic baffle pipeline:Ø3mm 7. Compressed air pressure:<0.8MPa,>0.5MPa 8. Baking temperature:Water supply status<200 ℃, flange in non water state<100 ℃ 9. Electrical interface: BCNsocket
Standard Accessories	1	EQ-TM106-1 Monitoring Component	1 piece
	2	EQ-TM106-2 Display Instrument	1 unit
	3	EQ-TM106-3 probe	1 piece