The Hitachi scanning electron microscope SU1510 adopts a sophisticated design, reducing its volume by 20% compared to similar devices with the same resolution and configuration, saving space. It is equipped with secondary electron and backscatter detectors as standard, making it easy to observe morphology and contrast at the same time. It features the four bias voltage, four aperture stop, high-resolution backscatter, and long liner design commonly found in Hitachi tungsten filament electron microscopes.
Hitachi Scanning Electron Microscope SU1510
Product Introduction
Adopting exquisite design, the volume is reduced by 20% compared to similar devices with the same resolution and configuration, saving space. It is equipped with secondary electron and backscatter detectors as standard, making it easy to observe morphology and contrast at the same time. It has the four bias voltage, four aperture stop, high-resolution backscatter, and long liner design commonly found in Hitachi tungsten filament electron microscopes.
The host has a width of only 55cm, a compact size, and a high-performance variable pressure scanning electron microscope with a resolution of 3.0nm.
The main features of Hitachi scanning electron microscope SU1510 are:
1. The instrument body has been reduced by 20% compared to the past, allowing for more freedom in choosing the installation site.
2. Equipped with low vacuum function as standard, it can observe non-conductive materials without spraying. High and low vacuum conversion can be completed with just one click.
3. The sample stage can load samples with the largest diameter of 153mm and a height of 60mm (WD=15mm), and perform EDX analysis.
4. Powerful mouse control function, capable of performing all operations of the electron microscope.
5. Molecular pump vacuum system, clean and pollution-free.
Technical parameters:
Secondary electronic resolution |
3.0nm (high vacuum, 30kV) |
Backscattered electron resolution |
4.0nm (low vacuum: 60Pa, 30kV) |
magnification |
5~300000 times |
accelerating voltage |
0.3~30 kV |
sample stage |
X 0~80mm
Y 0~40mm
Z 5~50mm
T -20~80mm
R 360°
|
Sample platform control |
Manual (optional: 2-axis motor) |
Zui Large Load Sample Size |
Diameter: 153mm |
Zui Grand View Scope |
Diameter: 126mm (XYR combined) |
Zui Large Sample Height |
60mm (WD=15mm) |
Low vacuum range |
6-270Pa (set from menu) |
filament |
Centered cartridge filament |
objective aperture |
4-hole variable aperture |
Gun bias voltage |
Fixed proportional bias, manual bias, automatic 4-bias |
detector |
Secondary electron detector, high sensitivity semiconductor backscattered electron detector |
EDX analysis location |
WD=15mm,TOA=35° |
vacuum system |
1 molecular pump, 1 mechanical pump |
safety measures |
Power outage, leakage, automatic protection |




Application fields:
semiconductor
biology
polymer