German INFICON helium mass spectrometer leak detector

Dry helium leak detector UL3000 Fab (PLUS)

Upgraded and enhanced version of UL1000 Fab

The INFICON helium leak detector UL3000 Fab (PLUS) is designed to meet the leak detection requirements in semiconductor applications.

This leak detector is flexible, mobile, highly sensitive, and reliable, capable of quickly starting and providing fast and accurate resultsThe measurement results.

Quickly obtain results
The improved vacuum system adopts a low maintenance vacuum pump design, which can detect leaks under atmospheric pressure. The durable mass spectrometry system ensures longer operating time and lower maintenance costs. The HYDRO-S software in UL3000 Fab PLUS can eliminate water vapor in the system, making the leak detection process faster.

The UL3000 Fab PLUS adopts the mature sniffer circuit SL3000 (with a length of up to 10 meters), which further enhances the sniffing capability.

Rotating remote control display
The new touch screen display can remotely display measurement results and status information. The user guided menu structure makes it easy to operate, even inexperienced operators can handle it. UL3000 Fab (PLUS) can be wirelessly controlled through smartphones or tablets - no special software or applications are required. Press the button to transfer the recorded and stored test results to other storage media for further analysis.

Thin design for high operability
The UL3000 Fab (PLUS) features a low center of gravity, large bottom wheels, ergonomically designed handle, and slim casing, allowing it to move freely even in confined spaces.

function

• Can be measured under atmospheric pressure
• Intuitive user guide and touchscreen display
• Durable and sturdy vacuum system, not easily affected by dust and pollutants
• Small turning radius and outstanding mobility
• Can be operated through a web browser using a smartphone
• Low maintenance requirements
• Accessories are already included on the device

German INFICON helium mass spectrometer leak detector

Typical Applications

• Perform leak detection on components before installation in existing tools
• Inspection and installation of process gas system
• Perform automatic testing of sealing components using TC1000 test box
• Leak detection conducted in environments with strict requirements for testing conditions and cleanliness