Film thickness controller

Multi purpose IC/5Film thickness controllerIdeal for controlling the deposition rate and thickness of film layers in multi-source, multi crucible, multi material, or multi process systems. IC/5 can meet the needs of complex, high demand, and special applications. It excels in process control, logical functionality, program and membrane storage capacity, process data management, especially in controlling deposition rate and membrane thickness.

Main performance parameters

Frequency resolution: 0.03 Hz at 6.0 MHz

Quality resolution: 0.375 ng/cm ²

Induction chip frequency: 2.5, 3, 5, 6, 9.5, 10 MHz

◆ Film thickness display: 0.000-999.9 KÅ

Film formation rate: 00.0-999 Ang/sec (0-9.99 μ m/min)

Number of film layers: 1 to 999

◆ Graphic display: 256 × 64 LCD, CCFL background lighting

◆ Complete configuration

◆ One MDC360C host, one set of oscillator and cable, one probe, and five chips

◆ Host size: 16.98 × 3.47 × 9.355 (unit: inches)

Front panel width 18.98 inches

Comprehensive process control

IC/5 has a wide range of functions, including initiating the evacuation process, controlling valves, and activating substrate heaters. These enhanced features eliminate the need for auxiliary instruments in the system, thereby reducing its complexity and cost. The logic and control functions of IC/5 include 100 programmable logic states; The I/O and TTL relay circuit board provides up to 24 relay outputs, 28 TTL inputs, 14 TTL outputs, 20 counts, and 20 timers. The logical state can be used in conjunction with external inputs or outputs. Each state can contain up to 5 functions and be linked using Boolean logic. IC/5 can provide 6 assignable analog outputs, deposition rate, film thickness, or deviation of deposition rate for source control or graphic recorder output.

Powerful process prescription and data management

The IC/5 membrane controller provides several functions and options to help users efficiently manage process prescriptions and data:

Rich onboard storage - up to 50 processes and 250 membrane layers. Allow instant access to the process data and prescription files you use. This accessibility is particularly valuable for complex processes involving many film layers, coating systems operating in multiple processes, and applications such as research and process development.

Disk drive options - used for unlimited storage of process data and prescriptions. Offline editing software option - used for typing or inputting data on a computer (not an IC/5 panel). Programming with this software is more convenient and effective, especially for multi-layer film and multi material processes. Data recording - Relevant process information (final film thickness, average deposition rate, number of runs, film layers, etc.) can be automatically recorded in ASCII format into remote communication ports, printer ports, or disks. By using disk drive options, IC/5 can save data in an unfolded format, simplifying the process of data storage and processing. Data recording can facilitate post operational analysis and quick calibration. For production that follows ISO9000 or QA certification, process tracking is *.

Auto Z –Exquisite coating for multi-layer materials

The Auto Z technology that automatically determines the Z ratio in IC/5 improves the control accuracy of coating thickness and deposition rate, and users no longer need to calculate the acoustic resistance (Z) ratio³When depositing multiple materials on a crystal, the ratio Z varies with the proportion of materials on the crystal, therefore, the change in Z value is dynamic. The Z ratio during the Auto Z continuous correction process. In the process of depositing layered or alloy materials on a single crystal, this function is particularly important to maintain accurate film thickness and deposition rate.

³Auto Z - US Number 5112642

AUTO TUNE –Used for quick setup

The Auto Tune function of IC/5 eliminates the need for repeated probing steps, saving setup time. It can quickly and automatically determine the feedback control loop constant of the source. Auto Tune selects the best algorithm among several control algorithms, including the three parameter PID (proportional, integral, derivative) algorithm, to achieve smooth control of various sources.

Multi sensor measurement–Used for high repeatability

For certain optical coatings and other applications, repeatability and uniformity are particularly important. The IC/5 controller can integrate measurements of up to 8 sensing components, reducing the uneven distribution effect of the source and ensuring good film deposition rate and final film thickness between the previous and next coating runs. When the substrate rotates on the planetary substrate holder, IC/5 simultaneously collects data from the positions of various sensing elements to ensure that the obtained information represents the distribution of the current source. Compared with the control instrument of a single sensing element, the measurement of multiple sensing elements greatly improves the repeatability of film thickness due to the fixed total deposition rate of the control film layer and its independence from fluctuations in the source distribution. When the distribution pattern of the source changes, IC/5 adjusts the power appropriately. Although the deposition rate on any sensing element may vary significantly, the overall deposition rate remains constant. The total amount of material deposited on each substrate is precisely controlled; The overall film thickness accuracy can be improved by two to three times compared to a single sensor controller. Multi sensor measurement can help you:

When do you expect to add the source again

Determine the optimal settings for parameters such as scanning, range, and high-frequency vibration of the electron gun

Formulate better process prescriptions

Because all sensing components are linked to an IC/5 controller, the space requirement for the cabinet is small, and its calibration speed is three to five times faster than the old-fashioned multi controller/computer combination structure.

Accurate co deposition

IC/5 controls simultaneous coating of two materials. It contains a programmed ratio parameter that controls the alloy ratio in varying deposition rates, as well as a cross sensitivity (or serial adaptation) parameter that automatically compensates for material plating from one source onto sensing elements used to control another source. The Auto Z function also contributes to the co deposition of IC/5, maintaining the accuracy of film thickness when different materials are mixed on a single crystal.

Easy to install into existing devices

IC/5Film thickness controller Equipped with compatible cables, it is easy to install into existing devices and replace old INFICON or other manufacturers' membrane controllers. Please contact our department for details.