Film thickness controller

NegotiableUpdate on 04/29

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

INFICON film thickness control instrument, the leader in thin film coating control technology, now provides you with high production value and low cost of ownership instruments. Whether you need to control the qualification of the product or use it for scientific research projects. INFICON XTC/3 can * meet your requirements. $r$n*， Practical single-layer and multi-layer coating rate control

Product Details

Film thickness controller

The XTC/3 thin film coating controller for single-layer and multi-layer coating processes is equipped with ModelLock1 technology, providing reliable mode jump prevention function to achieve consistent coating quality. The XTC/3 thin film coating controller can accurately control the coating rate and film thickness, and has the ability to control almost any number of film layers. Easy installation and stable reliability ensure high productivity.

Characteristics

There are single film and multi film models available

ModelLock technology prevents film thickness errors caused by mode jumps

■ Supports INFICON Crystal 12TM, CrystalSix? Automatic crystal switching with dual probes for high productivity

The XTC/3M multi film model supports up to 99 process steps, 999 film layers, 32 coating layers, and 2 coating layers

Sensors and two sources

The XTC/3S single-layer model supports up to 9 coatings, 2 sensors, and 2 sources

Easy to read TFT LCD graphic display

■ For ease of retrieval, provide * and descriptive film and process names

■ Ethernet connection software is available

Is Windows running separately (without the need for a computer) or on a PC? Software Options

■ Plug and play replacement of INFICON XTC/2 controller (limited to XTC/2 functions and command groups)

Film thickness controller

technical specifications

Function, parameters, or technical specifications	XTC/3S single-layer film	XTC/3M multilayer film
Measure the frequency variation of resolution	＋0.05Hz	＋0.05Hz
Measurement interval	0.25 seconds	0.25 seconds
Thickness and velocity resolution/measurement	0.06A, At tool/density=100	0.06A, At tool/density=100
	Fundamental frequency=6M Hz	Fundamental frequency=6M Hz
Support XTAL2 conversion	yes	yes
BEng Computer Communications	RS232 standard, Ethernet TCP/IP option	RS232 standard, Ethernet TCP/IP option
Large RS232 baud rate	115.2 thousand baud	115.2 thousand baud
Number of relays	12 standards, no examples available	12 standards, examples can be provided
Number of programmable relay functions	1	1
Each relay function	1	1
Rated voltage of relay	30V DC or 30V AC RMS or 30V DC	30V DC or 30V AC RMS or 30V DC
	42V peak, at 2.5 amps	42V peak, at 2.5 amps
Input number	8TTL, 24V DC high	8TTL, 24V DC high
Number of programmable input functions	1. No examples available	1. Examples
Record the input number of the instrument	1	1
Manual power supply/handheld controller	yes	yes
exhaust fan	none	none
test mode	yes	yes
Light blocker delay	yes	yes
Secondary tools	yes	yes
Maximum allowable phase shift frequency	1.0 M Hz	1.0 M Hz
Chassis dimensions	1/2 rack, 2U height	1/2 rack, 2U height
Resolution of speed and film thickness display	0.1A seconds, from 0.0 to 99.9A/s; 1A/second, from 100 to 999A/s	0.1A seconds, from 0.0 to 99.9A/s; 1A/second, from 100 to 999A/s
	Display film thickness resolution=1A	Display film thickness resolution=1A
Select coating by inputting	yes	No
User guidance language	English, Chinese	English, Chinese
control loop	PID	PID
data logging	yes	yes
Quality and stability functions	yes	yes
Sample and maintenance	yes	yes
Crucible selection	yes	yes
Crucible feedback input	yes	yes
Select control voltage polarity	Yes,+/-2.5, 5, 10 volts	Yes,+/-2.5, 5, 10 volts
	15 bit resolution	15 bit resolution
Program lock code	yes	yes
User labeling process/coating	No	yes
XTC/2 RS232 communication compatibility	Yes (limited)	Yes (limited)