Cleanliness Cleanroom

Cleanliness CleanroomNo matter how the external air conditions change, the indoor environment can maintain the originally set requirements for cleanliness, temperature, humidity, and pressure.

The main function of a cleanroom is to control the cleanliness degree, temperature, and humidity of the atmosphere that products (such as silicon chips) come into contact with, so that products can be produced and manufactured in a good environmental space, which we call a cleanroom. According to convention, the level of dust-free purification is mainly determined by the number of particles with a diameter greater than the classification standard per cubic meter of air. That is to say, the so-called dust-free is not 100% without any dust, but controlled in a very small amount of units. Of course, the particles that meet the dust standard in this standard are already very small compared to the common dust we see. However, for optical structures, even a small amount of dust can have a significant negative impact. Therefore, in the production of optical structure products, dust-free is an inevitable requirement.

Controlling the number of fine dust particles larger than 0.5 microns per cubic meter to below 3500 meets the dust-free standard. The dust-free standard applied in chip level production and processing has higher requirements for dust than *, and such high standards are mainly used in the production of some higher-level chips. The amount of fine dust is strictly controlled within 1000 per cubic meter, which is commonly known as the 1K level in the industry.

Overall planning and layout of cleanroom cleanliness:

Air shower room, transmission passage, visible glass window

Purification structure, purification system, and power distribution system

The division of various functional areas, such as cleaning and sample preparation area, particle analysis area, file storage area, etc

Cleanliness CleanroomMeet the requirements of standards such as ISO14644-2015 and GB50073-2001

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