CVD system tube furnace

GR.TFDetailed introduction of series vacuum tube furnace

The GR.TF series vacuum tube furnace has a reasonable performance design and integrates multiple functions, achieving ideal results in safety, reliability, and practicality.

1. The temperature ranges from 1100 ℃ to 1800 ℃, with a heating zone of 300mm.

2. The furnace body adopts a double-layer furnace shell structure, with fans installed between the double-layer furnace shells to quickly raise and lower the temperature, and the surface temperature of the furnace shell is low.

3. The furnace tube adopts high-purity quartz tube or corundum tube, and both ends are sealed with SUS304 high vacuum flange.

4. The furnace material is made of high-quality imported alumina polycrystalline fiber vacuum adsorption, which significantly improves energy efficiency compared to traditional hard furnace materials such as electric furnaces. It has strong resistance to sudden cooling and heating. The 1100 ℃ electric furnace is composed of two parts, the upper part of the furnace can be flipped back as a whole at 110 ℃. The furnace of electric furnaces above 1100 ℃ is integrated, making it convenient to take and place experimental materials and replace furnace tubes. The heating element adopts Swedish Kantar resistance wire, silicon carbon rod, and silicon molybdenum rod.

5. The temperature control system of the electric furnace adopts artificial intelligence regulation technology, with an instrument control accuracy of ± 1 ℃. It has PID regulation, fuzzy control, self-tuning ability, and can program various heating programs. It has ultra-high temperature alarm function, thermocouple damage power-off function, and built-in parameter code control function.

6. Heating rate ≤ 30 ℃/min (recommended heating rate ≤ 10 ℃/min), can write 30 segment automatic heating program, controlled by thyristor, equipped with digital LED voltmeter and ammeter.

7. Optional RS-485 communication interface, data management software, with paperless recording of historical data and temperature rise curves, correction of temperature deviation errors, and the ability to manage multiple devices and remotely diagnose and analyze faults.

8. Multiple safety protection designs, good safety performance, and long service life.

9. Electric furnaces can be evacuated and filled with atmosphere, with a vacuum degree of up to 10pa (mechanical pump). If a higher vacuum degree is required, a molecular pump can be chosen, reaching 6.67x10-3pa.

Standard configuration:

1. 1 set of 304 stainless steel flange

2. 4 sealing rings

3. 2 furnace plugs

4. 1 furnace hook

5. 1 set of instruction manual, warranty card, and certificate of conformity

6. 1 quartz tube or corundum tube

High vacuum pump group (molecular pump group)

The GR-620/GR-500F series composite molecular pump unit is a clean ultra-high vacuum acquisition equipment assembled on a rack, consisting of F160/620 series composite molecular pumps or FF-160/500F series composite molecular pumps, front-end vacuum pumps, isolation and release valves, front-end pipelines, water cut-off protectors, molecular pump power supplies, high vacuum detection systems (composite vacuum gauges), control power supplies, etc. Easy to install, simple to operate, easy to connect, reliable in performance, widely used in surface analysis, accelerator technology, semiconductor equipment, plasma technology, manufacturing of electric vacuum devices, and various fields of vacuum technology.

Technical performance of FJ-620 molecular pump unit:

GR.TFSeries vacuum tube furnace models and specifications