The first domestically produced commercial high-resolution glow discharge mass spectrometer has been successfully delivered

Recently, the high-resolution glow discharge mass spectrometer (model: Sparkle), led by the mass spectrometer team of the School of Electrical Engineering at Xi'an Jiaotong University and developed under the "14th Five Year Plan" National Key Research and Development Program "Basic Research Conditions and Major Scientific Instrument Research and Development Special Project, has completed user delivery, marking a key breakthrough in the localization process of high-end scientific instruments in China.

Glow discharge mass spectrometer is a "super microscope" for exploring solid materials. In high-end industries such as chip manufacturing, even trace impurities mixed into the matrix material can cause lattice defects, leading to the failure of the entire chip. The glow discharge mass spectrometer has ultra-high trace detection limits as low as ppt (parts per trillion), making it an indispensable high-end precision instrument for achieving precise quantification of impurities in ultra-high purity materials.

In the past, glow discharge mass spectrometers relied entirely on imports, with extremely high procurement and maintenance costs. This commercialization landing directly solves the key pain point of domestic testing institutions and related enterprises' equipment being controlled by others, such as Kehui Testing. It significantly reduces the equipment procurement and operation costs of domestic material testing institutions, improves the quality testing efficiency of key products such as high-purity materials and integrated circuit materials, and helps enterprises break through technological bottlenecks; Through independently controllable testing equipment, China's supply chain security and data security in the field of strategic materials are guaranteed, providing solid technical support for high-end manufacturing, new energy, aerospace and other industries.

The commercial model delivered this time has passed the acceptance of more than ten core key indicators, including abundance and sensitivity, after complete machine debugging. The on-site operation of the equipment is stable, the data output is fast, the detection accuracy fully meets the standard, and the feedback is excellent, fully verifying the reliability and environmental adaptability of the domestic glow discharge mass spectrometer.

Sparkle glow discharge mass spectrometer, led by Xi'an Jiaotong University, has cooperated with Northwest Nuclear Technology Research Institute, Kunyuan Instrument (Tianjin) Co., Ltd., North China University of Technology, Chinese Academy of Sciences, Shanghai Silicate Institute, Steel Research Nake Testing Technology Co., Ltd., China Academy of Metrology, Guohe General Test and Evaluation Certification Co., Ltd. and other units to carry out research and development of complete instrument, engineering industrialization, solid reference material development and analytical method development, realizing100% localization of key components，Key technologies are 100% independently controllable，Performance indicators have reached the international advanced levelFully empowering China's trace impurity detection capability in the field of integrated circuit materials, strengthening the industry's independent and controllable defense line, and completely breaking the foreign technology blockade.