Optical 3D profilometer

Sensofar successfully developed a new plu technology in 2004, which combines conjugate focus and interference technology into a single sensing head. It does not require hardware disassembly and can be switched from software, making it very convenient for users. This technology won the Invention Award in the 2004 journal Photonics Spectra '.

SensofarOptical 3D profilometerSneoxEquipped with AFM grade roughness and height measurement functions, the non-contact measurement method * will not damage the sample surface, making it easy to use and able to quickly obtain measurement results.

Three major modes are switched through software

Focusing on:

The development of confocal microscopy is aimed at measuring surfaces ranging from flat to very rough. By vertically scanning the surface, the focus of the objective lens is scanned over the sample surface to find the corresponding height of each pixel on the surface. The confocal contour provides ultra-high resolution, with a sample slope allowed up to 71 degrees.

White light interference:

White light interferometry VSI (Vertical Scanning Interferometers) has been applied in surface measurement for some time, using interference fringes to scan the surface of an object, and by detecting the high-intensity positions of the interference fringes, the entire surface morphology is outlined.

Phase difference interferometry is a new application in interferometric measurement, specifically designed to deal with samples with extremely small height differences, samples with height differences of more than 200 nm, or very flat roughness, which are very suitable for measurement using this mode.

Multi focal plane overlay:

Multi focal plane overlay technology is used to measure very rough surface morphology. Based on Sensofar's experience in confocal and interferometric technology applications, this feature has been specially designed to meet the needs of low magnification confocal measurements. The advantages of this technology are fast (mm/s), wide range scanning, and large slope support (up to 86 °). This feature is particularly useful for measuring workpieces and molds

Optical 3D profilometerSneoxApplicable industries:

LCD、IC、LEDs、Sillicon、 Solar cells, hole defects, semiconductors, leather, paper, roughness measurement, stamps, film thickness measurement, tin balls, diamonds