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Shanghai Mangofei Optical Technology Co., Ltd

  • E-mail

    ganxiafen@megphy.com

  • Phone

    17706131531

  • Address

    Room 13, 6th Floor, Building B, Tengfei Xinsu Industrial Park, No. 5 Xinghan Street, Suzhou Industrial Park

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NanoFocus 3D profilometer

NegotiableUpdate on 01/21
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Overview

Brief description: The μ surf series 3D profilometer adopts porous confocal technology, combined with CCD image capture, replacing the detector holes with a rotating disk with many holes, and then vertically moving the objective lens, similar to tomography, to accurately measure the 3D data of objects in a short time (about a few seconds). Its measurement method is non-contact and will not damage the surface of the sample. It does not require measurement in a vacuum environment and can also be observed using the function of a microscope. It can be used normally in harsh working environments.

Product Details

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NanoFocus μ surf series3D Shape Contour AnalyzerBy using porous confocal technology combined with CCD image capture, a rotating disk with many holes is used to replace the holes in the detector. Then, the objective lens is vertically moved, similar to tomography, to accurately measure the three-dimensional data of an object in a short time (about a few seconds). Its measurement method is non-contact and will not damage the surface of the sample. It does not require measurement in a vacuum environment and can also be observed using the function of a microscope. It can be used normally in harsh working environments. Due to the use of confocal method, compared with other methods, it can more accurately measure the height of objects and establish 3D stereoscopic images when measuring heights with large gradients, which has significant advantages.

μ surf series3D Shape Contour Analyzerapplication
The μ surf series is used to measure surface physical morphology and perform micro nano scale three-dimensional morphology analysis, such as 3D surface morphology, 2D depth morphology, contour (depth, width, curvature, angle), surface roughness, etc.
Precision components: detect components that require surface wear, surface roughness, and surface microstructure, such as engine cylinders, cutting edges, etc;

Life Sciences: Measuring Coating Thickness on Stents Brackets, etc
Microelectromechanical systems: detection of microdevices, detection of tissue structures in pharmaceutical engineering, such as gene chips, etc
Semiconductors: Detection of microelectronic systems, packaging, and auxiliary product structural design
Solar energy: 3D morphology characterization of solar cell grid lines, aspect ratio measurement, 3D morphology characterization after velvet production (single crystal pyramid size, quantity, angle, polycrystalline corrosion pit morphology, density), roughness analysis, etc
Paper: Measurement of three-dimensional surface morphology of paper and coins
LED: Used for measuring sapphire substrates, sampling the 3D morphology of WAFER after PSS ICP

μ surf seriesTechnical Specifications

LED light source: λ=505 nm, MTBF: 50000 h
Measurement time: 2-10 seconds
Measurement principle: non-contact, confocal
X/Y direction: Platform movement range: 100mmX100mm/200mmX200mm/300mmX300mm (size optional), motor-driven, X/Y direction resolution: 0.3 μ m
Z-direction measurement range: 350 μ m, Z-direction resolution:<1nm
Objective lens: 10X, 20X, 50X, 100X (optional)
Off axis camera (10X), maximum field of view 8 x 6 mm2 (optional)
Computer: High performance computer control system, powerful and comprehensive software, with splicing function
Equipped with a professional workbench: size 155x80x750 mm (LxH)
Working power supply: 100-240V, 50-60Hz, input: 550 VA
Material: Steel, Rubber, Marble
Weight: Approximately 150KG+80KG
Cleanroom Class: Capability Class 6 (according to DIN EN ISO 14644)