Constant pressure vacuum pump

KT-PID1000Z is a vacuum constant pressure control system that supports various models of two-stage rotary vane mechanical pumps with pumping speeds ranging from 4 cubic meters to 16 cubic meters per hour. The pumping rate of the vacuum pump is controlled by a linear valve, thereby obtaining precise measurement and constant pressure control of the chamber pressure. It can be combined with our company's tube furnace, coating instrument, sealing machine and other equipment to achieve precise pressure control for PVD, CVD, PECVD and other processes.

Widely used in diffusion, oxidation, epitaxy CVD、 In plasma sputtering and coating processes, fiber melting, mixed gas distribution systems, and other analytical instruments.

Technical Specifications:

Control method: PID algorithm control

Control range: 1000Pa-1Pa (depending on the chamber size and vacuum pump pumping rate)

PID regulation pumping rate range: 0-100%

Support vacuum pump: 4-16 cubic meters per hour pumping rate

Vacuum flange for exhaust port: KF16, KF25, KF40