3D surface profilometer

3D surface profilometer Slynx is a brand new non-contact device designed specifically for industry and research institutions3D surface profilometerIt has a simple design and diverse uses. Slynx is capable of measuring different materials, structures, surface roughness, and waviness, covering almost all types of surface morphologies. Its versatility can meet a wide range of morphology measurement applications. The core of Sensofar is to integrate three measurement methods into one, ensuring its * performance. Combined with the SensoSCAN software system, users will receive an incredible intuitive operating experience.

Application fields:

• automotive industry
• Consumer electronics products
• energy industry
• LCD (Liquid Crystal Display)
• Materials Science
• Microelectronics
• Micro manufacturing industry
• Micropaleontology
• optical device
• Machine tool processing industry
• semiconductor industry
• Watch manufacturing industry

Three in one measurement technology

ª Confocal Focus

Confocal technology can be used to measure the morphology of various sample surfaces. It has a higher lateral resolution than optical microscopes, up to 0.10um. It can be used to measure critical dimensions. When using a lens with a magnification of 150 times and a numerical aperture of 0.95, the confocal measurement slope reaches 70 ° on smooth surfaces (86 ° on rough surfaces). The confocal algorithm ensures the repeatability of Z-axis measurements in the nanometer range.

Interference

White light vertical scanning interferometry (VSI) is a powerful technique widely used for measuring surface characteristics such as morphology or transparent film structures. It is more suitable for measuring surfaces ranging from smooth to moderately rough, and can provide nanometer level vertical resolution regardless of the NA or magnification changes of the objective lens.

Multi focal plane superposition

Multi focal plane overlay technology is used to measure very rough surface morphology. Based on Sensofar's rich experience in integrating confocal and interferometric technologies, this feature has been specially designed to meet the needs of low magnification confocal measurements. The major highlights of this technology are its speed (mm/s), wide scanning range, and support for large slopes (up to 86 °). This feature is particularly useful for measuring workpieces and molds.