3D optical surface profilometer

newly designedthree-dimensionalOptical surface profilometerS neoxSubverting tradition, integrating confocal, interferometric, and multifocal overlay technologies into one, with no moving parts inside the measuring head.

Measurement technology:

confocal

Confocal technology can be used to measure the morphology of various sample surfaces. It has a higher lateral resolution than optical microscopes, up to 0.10um. It can be used to measure critical dimensions. When using a lens with a magnification of 150 times and a numerical aperture of 0.95, the confocal measurement slope reaches 70 ° on smooth surfaces (86 ° on rough surfaces). The confocal algorithm ensures the repeatability of Z-axis measurements in the nanometer range.

interfere

Phase difference interference (PSI)

Phase difference interferometry is a sub nanometer level precision technique used to measure the height morphology of smooth surfaces. Its advantage is that any magnification factor can ensure sub nanometer level longitudinal resolution. Using a 2.5-fold lens can achieve ultra-high vertical resolution and large field of view measurement.

White light interference (VSI)

White light interferometry is a technique for measuring various surface height morphologies with nanometer level measurement accuracy. Its advantage lies in the ability to ensure nanoscale longitudinal resolution at any magnification.

Multifocal superposition

Multi focal plane overlay technology is used to measure very rough surface morphology. Based on Sensofar's rich experience in integrating confocal and interferometric technologies, this feature has been specially designed to meet the needs of low magnification confocal measurements. The major highlights of this technology are its speed (mm/s), wide scanning range, and support for large slopes (up to 86 °). This feature is particularly useful for measuring workpieces and molds.

Measurement and analysis software

SensoSCAN

SensoSCAN is a simple and user-friendly operating software. It takes users into a 3D world and provides * user experience. In the software interface, users can intuitively and clearly understand the measurement methods used, while also displaying and analyzing data.

Powerful professional analysis software

Adding SensoPRO LT or SensoMAP software can easily achieve fully automated measurement and analysis.

Application:

three-dimensionalOptical surface profilometerS neoxIt can meet your various application requirements and play a key role in the semiconductor, biopharmaceutical, and biotechnology industries.