ellipsometer

UVISEL 2 is equipped with a sample visualization system (technology) that can be used to observe any sample surface. By combining 8 sizes of micro light spots, the spot can be accurately positioned in various limited sizes of the test area on the sample.

UVISEL 2 integrates the world's smallest chromatic aberration free micro spot technology, with a spot size of up to 35 μ m, allowing for wide spectral coverage even in micro area measurements.

The professional DeltaPsi2 software platform is easy and intuitive to operate, providing various optimized measurement and modeling functions for precise analysis of thin films.

UVISEL 2 is an elliptical polarization spectrometer with superior performance compared to all other models. It inherits the proven high-precision and high-sensitivity performance of the classic UVISEL ellipsoidal spectrometer, and has been redesigned with significantly improved performance.

Thin film measurement product line

Elliptical polarization method is an optical non-destructive measurement technique that can accurately characterize thin films, surfaces, and interfaces. Elliptical polarization spectrometer is mainly used to measure the thickness (from 1 µ m to 30 µ m) and optical constants (n, k) of thin films.

Elliptical Polarization Spectrometer

*The technology has the ability to characterize thin films and provide the highest sensitivity and accuracy in measurement.

In situ and onlineellipsometer

High precision and high-speed monitoring and control of thin film deposition and etching processes.

ellipsometerQuality control of thin films

New technology: One click measurement of film thickness and optical constants!

Large area measurement system

A system designed specifically for the display device industry, capable of handling seventh generation display substrates.

software

DeltaPsi2 is a new generation software developed based on a universal graphical user interface (GUI). The design goal is to provide an intuitive and comprehensive interaction between users and instruments. This multitasking software has multifunctionality and can be used for both off position and in position configurations, as well as driving fully automatic operations.