VFT fiber optic vacuum device

The VFT fiber optic vacuum device of Shanghai Wenyi Optoelectronic Technology Co., Ltd. is a device that connects optical fibers in the vacuum chamber, such as plasma monitoring. The fiber optic vacuum device includes an M12 screw with a Viton type sealing ring and 2 SMA fiber optic connectors, which can be easily connected to the fiber optic probe (two additional SMA905 fiber optic adapters need to be ordered). Multiple types of vacuum tubes are matched with optical fibers of all core diameters, ranging from 9 µ m to 1000 µ m, and available in UV200~1100nm and IR400~2500nm wavelength models, which can also be customized according to customer requirements.

Overview of VFT Fiber Optic Vacuum Device

The VFT fiber optic vacuum device provided by Wenyi Optoelectronics can import or export light into or out of a vacuum chamber to achieve ultra-high vacuum applications, such as optical monitoring in semiconductor processing and final detection of thin film adsorption.

It has good performance in isolated boxes and high-pressure applications, with a maximum vacuum degree of 10 ^ -7 mbar and an operating temperature of 200 ° C (customized up to 300 ° C).

The vacuum chamber requires a wall thickness of 5-40 mm, and a circular hole with a diameter of 12mm can be opened on the chamber. Pay attention to the smooth and scratch free side that is closely attached to the O-ring.

By using metal or glass cavities with high smoothness, the performance of VFT in ultra-high vacuum applications can be improved.

The VFT fiber optic vacuum device is not only used in semiconductor and thin film processing, but also an ideal tool for environmental monitoring, pharmaceutical processing, and optical coating production. It can also be applied in molecular beam epitaxy and vapor adsorption in chemical physics, and can serve as an excellent conduit for use with isolation boxes, glove boxes, and medium pressure devices.

The high and low voltage terminals of the VFT fiber optic vacuum device can be connected to the SMA905 connector, which can be easily used together with the optical fibers, light sources, accessories of Wen Yi Optoelectronics, as well as our company's spectrometer and other optical equipment.

The VFT fiber optic vacuum device has an M12 external thread, which can be directly screwed onto the cavity with the M12 threaded hole, or a prepared nut and washer can be used to screw into a smooth hole. The assembly process is very simple, just connect the fiber optic and VFT vacuum fiber optic through a SMA905 fiber optic adapter. On the low voltage side of the sample chamber, we recommend that users choose quartz optical fibers with metal sheaths as matching.

The fiber diameter of VFT fiber passing through the vacuum device can be selected from 9 μ m, 50 μ m, 100 μ m, 200 μ m, 400 μ m, 600 μ m, and 1000 μ m; The wavelength can be selected from UV200~1100nm and IR400~2500nm, and can be equipped with SMA905 or FC connectors.

Optional accessories

The VFT fiber optic vacuum device can be customized with matching vacuum flanges, such as KF16, KF25, KF40, etc

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