URE-2000/30 lithography machine

1Technical features

lHigh magnification binocular dual field microscope and22An inch widescreen LCD display simultaneously observes the alignment process and providesUSBOutput; It not only meets the requirements of high-precision alignment, but also can be used to detect exposure results, and the exposure results are easy to store

lAdopting inverted lighting makes it easier to replace the mercury lamp, with better heat dissipation and anti leakage effects

lDual station work for alignment and exposure positions, with automatic switching between the two stations

lAdopting embedded computers+Touchscreen operation, more convenient and stylish to operate

lThe loading and unloading process is very convenient, with a high degree of automation and easy operation. For university teaching and research (with good reliability and convenient demonstration) and factories(efficient)Especially suitable

2Technical parameters

lExposure area:100mm×100mm(Can be upgraded to)6Inches)

lExposure wavelength:365nm

lResolution:≤1mm(Glue thickness)1.5 mmThe regular glue

lAlignment accuracy:±0.6mm

lMotion range of microscope scanning table:X：10mm;Y:10mm

lMask size:2.5Inches3Inches4Inches5inch

lSample size: diameterf15mm--f100mm(Various irregular pieces)

thickness0.1mm--6mm

lExposure methods: timed (countdown) and fixed dose

lCapable of vacuum contact exposure and hard contact exposurelightFour functions: pressure contact exposure, and proximity exposure

lUneven illumination: 3%（f100mmScope)

lBinocular dual field alignment microscope: can be used through the eyepieceseeAlignment can also be achieved throughCCD+Monitor alignment, optical imaging, optical maximum magnification400Multiple, optical+Electronic amplification800times

Three pairs of objective lenses:4Double10Double20times

Three pairs of eyepieces:10Double16Double20times

lLeveling contact pressure ensures repeatability through sensors

lNumber setting alignment gap and gap

lEquipped with imprinting module interface and proximity module interface

lThe motion stroke of the mask relative to the sample:

X:±5mm; Y:±5mm;q:±6?

lMaximum focal thickness:400mm（SU8Adhesive, user provided testing conditions)

lParallelism of light source:3?

lExposure energy density:>25mW/cm2,Lighting surface temperature<35?C

lSingle layer exposure can be completed with just one click

lAdopting ball air flotation+Three Claw Leveling

lMercury lamp power:350W(DC,Import）

3. Dimensions:1400mm(Long)?900mm(wide)?1500mm(High)

4. Configuration

（1）Exposure Head

lCold light ellipsoidal mirror

l350WImported DC high-voltage mercury lamp(German Osram)

lXYZMercury lamp adjustment table

lcooling fan

lOptical System: Fixed Barrier, Variable Barrier, Shutter, Collimator Mirror1Collimator mirror2Fly eye lens group（79A lens)iLine filter, field lens, cold light reflector1Reflection mirror2

（2）Align the workpiece table

lLithography machine base

lWorkstation Switching Platform (Cylinder)

lMask sample overall motion table

lMask sample relative motion table

lRotating table

lSample leveling mechanism,Three point automatic completion

lSample focusing mechanism, motor automatic adjustment

lSubstrate pull-out up and down mechanism

lstage4One:f15mm 、f40mm、f60mm、f100mm(can be adjusted according to user requirements)

lMask clamp4One:2.5Inches3Inches4Inches5Inches (can be adjusted according to user requirements)

lSample pulling up and down mechanism

（3）Align microscope

lLight source power supply

lAlign the microscope body with binocular dual field of view

leyepiece3Yes, that's right（10Double16Double20Multiple, total6A)

lobjective3Yes, that's right（4Double10Double20Multiple, total6A)

lCCDAlign the system,22Inch LCD display

（4）Electric control system

lMercury lamp trigger power supply(350WDC mercury lamp)

lmcu

lcontrol panel

lControl cabinet table

（5）Pneumatic system

lCylinder, solenoid valve, pressure reducing valve, pneumatic switch, etc

lElectromagnetic valve drive

lpneumatic instrument

（6）Other attachments

lOne vacuum pump

lOne air compressor

lSupporting interface pipeline

（7）Technical data

lUse and Maintenance Manual

lqualification certificate of product inspection