URE-2000/17 Lithography Machine (Desktop)

Technical characteristics of URE-2000/17 ultraviolet deep lithography machine:
Align with a binocular dual field microscope; Ball bowl leveling, microcontroller control, touch switch, easy operation, strong practicality.

1Technical parameters

lExposure area:4inch

lExposure wavelength:365nm

lResolution:1.5mm(Glue thickness)2 mmThe regular glue

lAlignment accuracy:±1mm

lOverall motion range of mask sample:X：15mm;Y:15mm

lMask size:2.5Inches3Inches4Inches5inch

lSample size: diameterf15mm--f100mm

thickness0.1mm--6mm(Scalable to15mm)

lExposure methods: timed (countdown) and fixed dose

lUneven illumination: 5%（f100mmScope)

lBinocular dual field alignment microscope: can be used through the eyepieceseeAlignment can also be achieved throughCCD+Monitor alignment, optical imaging, optical maximum magnification400Multiple, optical+Electronic amplification800times

Three pairs of objective lenses:4Double10Double20times

Three pairs of eyepieces:10Double16Double20times

lThe motion stroke of the mask relative to the sample:

X:±5mm; Y:±5mm;q:±6linear measure

lMercury lamp power:200W(DC)

lExposure energy density:6mW/cm

2. Dimensions:650mm(Long)?600mm(wide)?900mm(High)

3. Configuration

（1）Exposure Head

l200WImported DC high-voltage mercury lamp(German Osram)

lXYZMercury lamp adjustment table

loptical system

lcooling fan

（2）Align the workpiece table

lMask sample overall motion table

lMask sample relative motion table

lRotating table

lSample leveling mechanism,hand movement

lSample focusing mechanism, manual

lstage3A（f50mm、?75mm、?100mm）

lMask clamp4A（2.5Inches3Inches4Inches5Inches)

lMask pulling up and down mechanism

（3）Align microscope

lLight source (equipment)2Only), power supply

lAlign the microscope body with binocular dual field of view

leyepiece3Yes, that's right（10Double16Double20Multiple, total6A)

lobjective3Yes, that's right（4Double10Double20Multiple, total6A)

lCCD(Taiwan)

l21Inch LCD display

（4）Electric control system

lMercury lamp trigger power supply(200WDC mercury lamp)

lmcu

lControl chassis

（5）Pneumatic system

lCylinder, solenoid valve, pressure reducing valve, pneumatic switch, etc

lElectromagnetic valve drive

lpneumatic instrument

（6）Other attachments

lOne vacuum pump

lpipe

（7）Technical data

lUse and Maintenance Manual

lMicroscope User Manual