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Yuanpai Scientific Instruments (Shanghai) Co., Ltd
Leica DM3 XL Inspection System for Microelectronics and Semiconductors
NegotiableUpdate on 04/07
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Overview
The speed of inspection, process control, or defect and fault analysis is crucial in the microelectronics and semiconductor industries. The faster you detect defects, the faster you respond. The DM3 XL inspection system, with its wide field of view, helps your team identify defects faster and increase your profitability. Fully utilizing the unique macro objective lens, the field of view is spacious by 30%.
Product Details
More details at a glance, work more efficiently
Seeing more details means working more efficiently. To quickly scan large components up to 6 inches, the DM3 XL offers a unique macro objective lens.
With a magnification of 0.7x, it can instantly capture a field of view of 35.7mm -30% wider than other conventional scanning objectives.
Under the macroscopic objective lens, defects are nowhere to be hidden:
- Improve your return on investment
- Reliable detection of areas with insufficient development at the edge or center of the chip
- Detecting uneven radial film thickness
LED suitable for all phase contrast observation methods
DM3 XL uses LED lighting for all phase contrast observation methods. LED lighting can provide a constant color temperature and provide true color imaging at all brightness levels.
Realize true color imaging at all brightness levels
- freely adjust
- No need to replace light bulbs - no downtime
- Replicable results
Due to their long lifespan and low power consumption, LEDs also have enormous potential for cost savings.
Optical 'expert'
DM3 XL allows you to enjoy excellent optical performance at an affordable price.
- Using oblique illumination to inspect sides, edges, or debris: illuminating the sample from different angles in a simple and effective way to visualize various morphologies.
- Use dark field contrast to detect small scratches or particles in the lower layers of the sample.
You will be amazed by the significantly improved sensitivity and resolution.
Different samples - Variable stage plugin
No matter what type or size of sample you want to test, there are a wide variety of stage plugins for you to choose from:
- Stage size: 150 mm x 150 mm
- Platform inserts: metal inserts, chip supports, or mask supports
- Quick rough or precise positioning of the loading platform
Comfortable and intuitive work
Color coded aperture assist (CCDA) simplifies the basic settings of resolution, contrast, and depth of field, helping to improve your work speed and minimize operational errors.
Intuitive and clear features help your team deliver the best results faster.
- Thanks to the easy-to-use controls, users can continue operating the microscope with both hands and focus their eyes on the sample while switching contrast or lighting.
- Right hand can easily control the light intensity controller
- Adjust the microscope according to different heights using a variable ergonomic tube and focusing knob
~For more product details, please call 021-80109380~
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